
Mercury 1500 and 2000 model encoders enable high precision performance
for Applimotion's HO Series servo motor. This new servo motor provides
much of the performance of a precision rotary stage, but at a fraction
of the cost. It's ideal for OEM applications.
Applimotion
is an innovator in the field of direct-drive solutions thanks to its
focus on leading-edge servo motor applications. According to Rob Mastromattei,
marketing manager at Applimotion, "We develop engineered solutions
based on our proprietary servo motor technology. In this metrology
application, we used MicroE Systems' Mercury encoders with our
HO Series servo motor. This hybrid design allowed us to create a rotary
stage that bridged the performance gap between a typical servo motor
and an expensive high-precision direct-drive rotary stage." Today,
this rotary stage |
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is at the
heart of a new metrology
system used in the manufacture of semiconductor components.
Before specifying
the HO Series rotary stage, the motion platform of this metrology
system was running open loop. The choice of motor compromised system
accuracy and restricted throughput. In addition, the motor resulted
in undesirable heating effects. The HO Series rotary stage, with
the Mercury encoder, eliminated these problems. A bolt-in
NEMA 23 size replacement for the old open loop motor, the HO Series
rotary stage
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Here For The Story
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