measurement instrument… and MicroE Systems' Mercury™ encoders made it possible. According to Blaine Spady, Nanometrics' director of automation products, "Mercury's small size and high precision were critical to
the success of our 9010DUV."
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The tiny, yet high performance Mercury™ 3000 programmable encoder solved critical motion control problems for the designers of Nanometrics' 9010DUV thin film measurement station. No other encoder offered the flexibility of small sensor size, high speed, programmable features, and 20 nanometer resolution.
If you want to be a player in the semiconductor process tool business you have to make each generation of equipment smaller, more affordable and higher performance than the one before. For Nanometrics, small system size and higher performance were the keys to acceptance for their thin film

A tiny encoder system with rotary resolution from 3,300 to 163,000 counts per rev. the ChipEncoder measures just 6mm square by 4mm high, yet it contains much of

the functionality of its larger brethren. Now for the first time, there is a viable solution that enables closed loop motion control for rotary and linear applications that were previously
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See MicroE Systems at
Photonics West
Booth 1542,
January 27- 29

IPC Printed Circuits Expo/Apex
Booth 2021,
February 24-26

MicroE Systems will be showing its new Mercury™ encoder products and the revolutionary ChipEncoder.



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